Semiconductor device and its manufacturing method

ABSTRACT

A semiconductor device comprises a plurality of inner leads extending around a semiconductor chip, a tape substrate  5  supporting the semiconductor chip and joined to respective end portions of the inner leads, wires connecting the inner leads and pads formed on a main surface of the semiconductor chip, a seal portion formed by resin-sealing the semiconductor chip and the wires, and a plurality of outer leads linking in a line with the inner leads and protruded from the seal portion to the exterior of four directions. A relationship between a length (a) of a shorter side of the semiconductor chip and a clearance (b) from the semiconductor chip, to a tip of the inner leads arranged at the farthest location from the semiconductor chip is a 2b. It is possible to attain a narrow pad pitch, and mount the semiconductor chip formed in a small size, and standardize the lead frame.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to a semiconductor manufacturingtechnique, and in particular, to an effective technique applied toenhancement of the reliability of semiconductor devices having smallsemiconductor chips arranged at narrow pad pitches.

[0002] In Japanese Patent Laid-Open No. 8-116012, No. 5-160304, No.5-36862, No. 11-289040, No. 11-514149, No. 7-153890, No. 6-291217 andNo. 5-235246, there are disclosed techniques for fixing inner leads tometal sheets and ceramic sheets via adhesives or the like.

[0003] Firstly, in Japanese Patent Laid-Open No. 8-116012, there isdisclosed a resin-sealing type semiconductor device in which an aluminumsheet is used as a heat radiation plate and the inner lead is fixed tothe aluminum sheet via adhesives by providing an insulation layer on asurface of the aluminum sheet. There are described objects of improvingheat-radiating properties, reducing material cost, and shorteningmanufacturing time.

[0004] In Japanese Patent Laid-Open No. 5-160304, there is disclosed asemiconductor device having a construction in which an aluminum sheet isused as a heat radiation plate and leads are affixed to the aluminumsheet via adhesives as an object of improving heat properties.

[0005] In Japanese Patent Laid-Open No. 5-36862, there is disclosed asemiconductor device having a construction in which a ceramic sheet isaffixed to inner leads. Heat generated from semiconductor chips isdischarged into the exterior thereof through ceramic sheets and innerleads to thereby improve heat-radiating properties of the semiconductordevice.

[0006] In Japanese Patent Laid-Open No. 11-289040, there are disclosedlead frames to which inner leads are joined at one surface of a heatradiation plate through an electrical insulation layer and adhesivelayer, and a semiconductor device using these lead frames. There aredescribed objects of improving the quality and reducing themanufacturing cost thereof.

[0007] In Japanese Patent Laid-Open No. 11-514149, there is disclosed anelectronic package having a construction in which semiconductor chipsand leads are fixed to a heat slug, on the surface of which electricinsulating anode treated coating is provided. There is described anobject of improving the heat properties thereof.

[0008] In Japanese Patent Laid-Open No. 7-153890, there is disclosed alead frame for a semiconductor device in which inner leads are fixed toheat radiation plates via adhesives, the heat radiation plates eachcomprising a metal sheet on which insulation treatment is treated. Thereare described objects of attaining improvement of heat radiatingproperties, high speed of signal processing, and long life of thesemiconductor device by this lead frame.

[0009] In Japanese Patent Laid-Open No. 6-291217, there is disclosed aheat-dissipation type lead frame in which a ceramic sheet is used as aheat radiation plate and inner leads are fixed to this ceramic plate viaadhesives. There are described objects of not only suppressing residualstress generated by heat but also preventing a shape of the frame frombeing deformed at the manufacturing stages thereof when this lead framehas a package structure.

[0010] In Japanese Patent Laid-Open No. 5-235246, there is disclosed asemiconductor device of a construction in which a main surface of eachsemiconductor chip is fixed to one surface of an insulation tape viaadhesives, and each inner lead is fixed to the other surface via theadhesives, and each semiconductor chip surface electrode is exposed fromeach hole of a insulation tape to connect the inner leads and thesurface electrodes via said holes by wires. There are described objectsof increasing the degree of design freedom of chips and attaining highspeed of signal transmission.

SUMMARY OF THE INVENTION

[0011] However, techniques described in the above-mentioned sevenJapanese Patent Laid-Open references except for Japanese PatentLaid-Open No. 5-235246 have objects of improving heat radiationproperties thereof by using metal sheets or ceramic sheets, and do notdisclose the concept that a technique for fixing inner leads to metalsheets or ceramic sheets via adhesives is used for semiconductor deviceshaving many pins and narrow pad pitches.

[0012] In addition, in Japanese Patent Laid-Open No. 5-235246, there isdisclosed a technique for fixing inner leads to an insulation tape. But,in the construction (the construction in which the main surface of thesemiconductor chip is fixed to one surface of the insulation tape, andthe inner lead is fixed in the other surface thereof, and the pads ofthe semiconductor chip are exposed from the holes of the insulation tapeto connect the inner leads and pads via said holes by the wires)described therein, there arise problems of decrease in the tape area oneach chip and in area for forming the holes in the insulating tape ifthe semiconductor chip becomes small and has many pins.

[0013] Consequently, there arises a problem of difficulty in attaining astructure having small chips and many pins on the basis of the structuredisclosed in Japanese Patent Laid-Open No. 5-235246.

[0014] Furthermore, in the construction disclosed in Japanese PatentLaid-Open No. 5-235246, since holes must be formed in the insulationtape, the insulation tape having a size fitted to the chip size isrequired and lead frame to which this insulation tape is affixed must beprepared. And so, there arises a problem of no attainment ofstandardization of the lead frame.

[0015] Accordingly, an object of the present invention is to provide asemiconductor device and a manufacturing method thereof which arecapable of achieving narrow pad pitches and improvement of thereliability.

[0016] Another object of the present invention is to provide asemiconductor device and a manufacturing method thereof that allow thelead frame to be standardized.

[0017] The above-mentioned and other objects and new features of thepresent invention will become apparent from the detailed description ofthe present specification and the accompanied drawings.

[0018] Of the inventions to be disclosed in the present application,outlines of typical inventions will be briefly described as follows.

[0019] That is, the semiconductor device that is the present inventioncomprises a plurality of inner leads extending around a semiconductorchip; a thin sheet-shaped insulating member supporting saidsemiconductor chip and joined to an end portion of said respective innerleads; a bonding wire for connecting surface electrodes of saidsemiconductor chip and said inner leads corresponding thereto; a sealportion formed by resin-sealing said semiconductor chip, said wire andsaid insulating member; and a plurality of outer leads linked to saidinner leads and exposed from said seal portion, wherein a length of ashorter side of a main surface of said semiconductor chip formed in aquadrilateral shape is twice or less than a distance from a tip of theinner leads arranged at the farthest location from a center line of thesemiconductor chip in a plane direction, to said semiconductor chip.

[0020] According to the present invention, it is possible to certainlyhave effects on suppression of wire flow caused by flow of mold resin,and of flapping of the inner leads, by fixing the inner leads to theinsulating member.

[0021] As a result, it is possible to improve reliability of thesemiconductor device having a construction in which the inner leads arejoined to the insulating member.

[0022] Further, it is possible to mount the semiconductor chip to theinsulating member even if a chip becomes small in size, and it is nolonger necessary to prepare the lead frame per size of a chip. As aresult, standardization of the lead frame can be attained.

[0023] In addition, the semiconductor device that is the presentinvention comprises a plurality of inner leads extending around asemiconductor chip; a thin sheet-shaped insulating member supportingsaid semiconductor chip and joined to an end portion of said respectiveinner leads; a bonding wire for connecting surface electrodes of saidsemiconductor chip and said inner leads corresponding thereto; a sealportion formed by resin-sealing said semiconductor chip, said wire andsaid insulating member; and a plurality of outer leads linked to saidinner leads and exposed from said seal portion, wherein a length of ashorter side of a main surface of said semiconductor chip formed in aquadrilateral shape is longer than a distance from a tip of the innerleads arranged at the farthest location from a center line of thesemiconductor chip in a plane direction, to said semiconductor chip, andis twice or less than this distance.

[0024] Further, the semiconductor device that is the present inventioncomprises a plurality of inner leads extending around a semiconductorchip; a thin sheet-shaped insulating member supporting saidsemiconductor chip and joined to an end portion of said respective innerleads; an adhesive layer for joining said inner leads and saidinsulating member; a bonding wire for connecting surface electrodes ofsaid semiconductor chip and said inner leads corresponding thereto; aseal portion formed by resin-sealing said semiconductor chip, said wireand said insulating member; and a plurality of outer leads linked tosaid inner leads and exposed from said seal portion.

[0025] According to the present invention, it is possible to suppresswire flow caused by flow of mold resin and/or flapping of the innerleads. As a result, a narrow pad pitch of the inner leads can beattained.

[0026] Further, it is possible to suppress expansion and shrinkage ofrespective tips of the inner leads at the time of solder reflowgenerated by thermal expansion coefficient differences between moldresin and the inner leads.

[0027] This can prevent disconnection generated in joining portionsbetween the wires and the inner leads. As a result, reliability of thesemiconductor device can be improved.

[0028] Moreover, in the semiconductor device that is the presentinvention, the semiconductor chip is thicker than a total of theinsulating member and the adhesive layer in thickness.

[0029] According to the present invention, since thickness of theinsulating member can be made thin, the thermal conduction can beimproved at the time of die bonding.

[0030] In addition, since the thickness of the insulating member can bemade thin, the semiconductor device can be formed in a thin shape. Thiscan reduce material cost thereof, and attain low cost of semiconductordevice.

[0031] The manufacturing method of a semiconductor device that is thepresent invention comprises the steps of: preparing a multi-link leadframe formed by linking in a line with a plurality of package areas,each of the package areas including a plurality of inner leads, a thinsheet-shaped insulating member joined to an end portion of each of saidinner leads and capable of supporting a semiconductor chip; mountingsaid semiconductor chip on said insulating member in each of saidpackage area; connecting surface electrodes of said semiconductor chipsand said inner leads corresponding thereto by a wire; forming a sealportion by resin-sealing said semiconductor chips, said wire, and saidinsulating member; and separating a plurality of outer leads exposedfrom said seal portion, from a frame section of said lead frame.

[0032] Further, the manufacturing method of a semiconductor device thatis the present invention comprises the steps of: preparing a matrixframe formed by arranging a plurality of package areas in a matrixarrangement, each of the package areas including a plurality of innerleads, a thin sheet-shaped insulating member joined to an end portion ofeach of said inner leads and capable of supporting a semiconductor chip;mounting said semiconductor chip on said insulating member in each ofsaid package area; connecting surface electrodes of said semiconductorchips and said inner leads corresponding thereto by a wire; forming aseal portion by resin-sealing said semiconductor chips, said wire, andsaid insulating member; and separating a plurality of outer leadsexposed from said seal portion, from a frame section of said matrixframe.

BRIEF DESCRIPTION OF THE DRAWINGS

[0033]FIG. 1A shows one example of a construction of a semiconductordevice that is Embodiment 1 of the present invention, and is across-sectional view.

[0034]FIG. 1B shows one example of a construction of a semiconductordevice that is Embodiment 1 of the present invention, and is a planview.

[0035]FIG. 2 is a partial plan view showing one example of a distancebetween a semiconductor chip and each inner lead in the semiconductordevice shown in FIG. 1.

[0036]FIG. 3 is a partially enlarged plan view showing one example of apad pitch and a pitch between the inner leads of a semiconductor chip ofthe semiconductor device shown in FIG. 1.

[0037]FIG. 4 is a partial plan view shown by partially cutting away oneexample of a construction of a matrix frame used for assembly of thesemiconductor device shown in FIG. 1.

[0038]FIG. 5 is a partially enlarged cross-sectional view showing astructure having a cross section taken along line A-A in FIG. 4.

[0039]FIG. 6 is a partial plan view shown by partially cutting away oneexample of a construction formed after die bonding, in assembly of asemiconductor device using a matrix frame shown in FIG. 4.

[0040]FIG. 7 is a partial enlarged cross-sectional view showing aconstruction having a cross section taken along line B-B in FIG. 6.

[0041]FIG. 8 is a partial enlarged cross-sectional view showing aconstruction formed after die bonding of a modified example of FIG. 7.

[0042]FIG. 9 is a partial plan view shown by partially cutting away oneexample of a construction formed after wire bonding, in assembly of asemiconductor device using a matrix frame shown in FIG. 4.

[0043]FIG. 10 is a partially enlarged cross-sectional view showing astructure having a cross section taken along line C-C in FIG. 9.

[0044]FIG. 11 is a partially enlarged cross-sectional view showing aconstruction formed after wire bonding of a modified example of FIG. 10.

[0045]FIG. 12 is a partial plan view shown by partially cutting away oneexample of a construction formed after resin sealing, in assembly of asemiconductor device using a matrix frame shown in FIG. 4.

[0046]FIG. 13 is a partially enlarged cross-sectional view showing astructure having a cross section taken along line D-D in FIG. 12.

[0047]FIG. 14 is a partial plan view showing one example of aconstruction of a frame body of a single line lead frame used forassembly of the semiconductor device shown in FIG. 1.

[0048]FIG. 15 is a partial enlarged plan view showing a construction ofa single line lead frame fixing an insulating member in a frame body.

[0049]FIG. 16 is a partially enlarged plan view showing one example of aconstruction formed after wire bonding, in assembly of a semiconductordevice using the single line lead frame shown in FIG. 15.

[0050]FIG. 17 is a partially enlarged plan view showing one example of aconstruction formed after resin sealing, in assembly of a semiconductordevice using the single line lead frame shown in FIG. 15.

[0051]FIG. 18 is a side view showing one example of a constructionformed after cutting and molding, in assembly of a semiconductor deviceusing the single line lead frame shown in FIG. 15.

[0052]FIG. 19 is a partially enlarged plan view showing one example of apackaging state of the semiconductor device shown in FIG. 1 and theother semiconductor device.

[0053]FIG. 20 is a partially enlarged cross-sectional view showing aconstruction of a modified example of FIG. 5.

[0054]FIG. 21 is a cross-sectional view showing a construction of asemiconductor device of a modified example of Embodiment 1 that is thepresent invention.

[0055]FIG. 22 is a cross-sectional view showing in detail a constructionof a semiconductor device of the modified example shown in FIG. 21.

[0056]FIG. 23 is a cross-sectional view showing in detail a constructionof a semiconductor device of the modified example shown in FIG. 21.

[0057]FIG. 24 is a cross-sectional view showing in detail a constructionof a semiconductor device of the modified example shown in FIG. 21.

[0058]FIG. 25A is a view showing a construction of a QFN that is asemiconductor device of a modified example of Embodiment 1 which is thepresent invention, and is a cross-sectional view.

[0059]FIG. 25B are a view showing a construction of a QFN that is asemiconductor device of a modified example of Embodiment 1 which is thepresent invention, and is a bottom view.

[0060]FIG. 26 is a cross-sectional view showing one example of aconstruction of a semiconductor device of Embodiment 2 that is thepresent invention.

[0061]FIG. 27 is a partial cross-sectional view showing one example of aconstruction of a lead frame used for assembly of the semiconductordevice shown in FIG. 26.

[0062]FIG. 28 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0063]FIG. 29 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0064]FIG. 30 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0065]FIG. 31 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0066]FIG. 32 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0067]FIG. 33 is a partial cross-sectional view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0068]FIG. 34 is a partial cross-sectional view showing one example of athickness relationship between a semiconductor chip, an insulatingmember, and an adhesive layer when the semiconductor chip is mounted tothe insulating member of a lead frame of Embodiment 2 that is thepresent invention;

[0069]FIG. 35 is a partially enlarged plan view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

[0070]FIG. 36 is a partially enlarged plan view showing a constructionof a lead frame of a modified example of Embodiment 2 that is thepresent invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0071] Referring now to the drawings, embodiments of the presentinvention will be described in detail below.

[0072] In the following embodiments, description will be made bydividing into a plurality of sections or embodiments if it is necessaryfor convenience. But, particularly except for specified cases, aplurality of sections or embodiments has something to do with eachother, and one thereof has something to do with a modification, or adetailed or supplementary explanation, or the like of parts or theentire of the other thereof.

[0073] Additionally, in the following embodiments, in the case where thenumber and the like (including the number, numerical value, quantity,range and the like) of elements are mentioned, except the casesparticularly specified, cases apparently restricted to the specificnumber and the like, the embodiments will not be limited to thatspecific number and may have numbers more than or less than the specificnumber.

[0074] Furthermore, in the following embodiments, it is needless to saythat, except for the cases particularly specified, the cases thought tobe essential apparently and in principle and the like, the components(including element steps and the like) are not always essential.

[0075] Similarly, in the following embodiments, except for the casesparticularly, and the cases thought not to be so apparently and inprinciple and the like, mention of shapes, positional relationships andthe like of the components and the like includes substantially ones likeapproximate or similar to the shapes and the like. Similarly, this isapplied to the numerical values and ranges.

[0076] In all the drawings for describing the embodiments, the samereference numbers denote components having the same function, andrepetitions thereof will be omitted.

EMBODIMENT 1

[0077]FIGS. 1A and 1B are views showing one example of a construction ofa semiconductor device that is Embodiment 1 of the present invention,wherein FIG. 1A shows a cross-sectional view and FIG. 1B shows a planview. FIG. 2 is a partial plan view showing one example of a distancebetween a semiconductor chip and respective inner leads in thesemiconductor device shown in FIG. 1. FIG. 3 is a partial enlarged planview showing one example of a pad pitch between adjacent semiconductorchips and of a lead pitch between adjacent inner leads in thesemiconductor device shown in FIG. 1. FIG. 4 is a partial plan viewshown by partially cutting away one example of a construction of thematrix frame used for assembly of the semiconductor device shown inFIG. 1. FIG. 5 is a partially enlarged cross-sectional view showing astructure having a cross section taken along line A-A in FIG. 4. FIG. 6is a partial plan view shown by partially cut away one example of aconstruction formed after die bonding, in assembly of the semiconductordevice using the matrix frame shown in FIG. 4. FIG. 7 is a partiallyenlarged cross-sectional view showing a structure having a cross sectiontaken along line B-B in FIG. 6. FIG. 8 is a partially enlargedcross-sectional view showing a construction formed after die bonding ofa modified example of FIG. 7. FIG. 9 is a partial plan view shown bypartially cut away one example of a construction formed after wirebonding, in assembly of the semiconductor device using the matrix frameshown in FIG. 4. FIG. 10 is a partial cross-section view showing aconstruction having a cross section taken along line C-C in FIG. 9. FIG.11 is a partially enlarged cross-sectional view showing a constructionformed after wire bonding of a modified example of FIG. 10. FIG. 12 is apartial plan view shown by partially cut away one example of aconstruction formed after resin sealing, in assembly of thesemiconductor device using the matrix frame shown in FIG. 4. FIG. 13 isa partially enlarged cross-sectional view showing a structure having across section taken along line D-D in FIG. 12. FIG. 14 is a partial planview showing one example of a construction of a frame body of a singleline lead frame used for assembly of the semiconductor device shown inFIG. 1. FIG. 15 is a partially enlarged plan view showing a constructionof the single line lead frame fixing insulating members to the framebody of FIG. 14. FIG. 16 is a partially enlarged plan view showing oneexample of a construction formed after wire bonding, in assembly of thesemiconductor device using the single line lead frame shown in FIG. 15.FIG. 17 is a partially enlarged plan view showing one example of aconstruction formed after resin sealing, in assembly of thesemiconductor device using the single line lead frame shown in FIG. 15.FIG. 18 is a side view showing one example of a construction formedafter cutting and molding, in assembly of the semiconductor device usingthe single line lead frame shown in FIG. 15. FIG. 19 is a partiallyenlarged plan view showing one example of each packaging state of thesemiconductor device shown in FIG. 1 and another semiconductor device.FIG. 20 is a partially enlarged cross-sectional view showing aconstruction of a modified example of FIG. 5. FIG. 21 is across-sectional view showing a construction of a semiconductor devicethat is a modified example of Embodiment 1 in the present invention.FIG. 22 is a cross-sectional view showing the detailed construction ofthe semiconductor device that is the modified example shown in FIG. 21.FIG. 23 is a cross-sectional view showing the detailed construction ofthe semiconductor device that is the modified example shown in FIG. 21.FIG. 24 is a cross-sectional view showing the detailed construction thatis the semiconductor device of the modified example shown in FIG. 21.FIGS. 25A and 25B show a construction of QFN of the semiconductor devicethat is the modified example of Embodiment 1 of the present invention,wherein FIG. 25A shows a cross-sectional view and FIG. 25B shows abottom view.

[0078] The semiconductor device of Embodiment 1 incorporates asemiconductor chip that is a resin-sealed type and a surface-packagingtype and is comparatively small in size and has a narrow pad pitch (forexample, having a pad pitch of 80 μm or less). In Embodiment 1, as oneexample of this semiconductor device, a QFP (Quad Flat Package) 6 shownin FIG. 1 will be taken up for description.

[0079] Furthermore, the QFP 6 of Embodiment 1 is of a multiple pin type.

[0080] A basic constitution of the QFP 6 will be explained. As shown inFIGS. 1A and 1B, the QFP 6 comprises a plurality of inner leads 1 b, athin sheet-shaped insulating member, bonding wires 4, a seal portion 3and a plurality of outer leads 1 c. The plurality of inner leads 1 bextend on a circumference of a semiconductor chip 2. The thinsheet-shaped insulating member supports the semiconductor chip 2 and isjoined to an end portion of each of the inner leads 1 b. The bondingwires 4 connect pads 2 a formed on a main surface 2 a of thesemiconductor chip 2 as surface electrodes, and inner leads 1 bcorresponding to these, to one another. The seal portion 3 is formed byresin-sealing the semiconductor chip 2, the wires 4 and theabove-mentioned insulating member. The plurality of outer leads 1 c isouter terminals projecting from the seal portion 3 to the exteriordirected by four directions. These outer leads 1 c are processed to bendin gull-wing shape.

[0081] The above-mentioned insulating member is a tape substrate 5, forexample, comprising a tape base 5 a which is made of epoxy system andthe like having insulating properties, and an adhesive layer 5 b whichhas insulating properties and is made of thermoplastic resin and thelike. The insulating member supports the semiconductor chip 2 at a chipsupporting surface 5 c thereof. An end portion of each of the innerleads 1 b is fixed to the insulating member 5 by the adhesive layer 5 b.Therefore, the QFP 6 has such a structure as to suppress wire flow orflapping of each inner lead 1 b caused by flow of mold resin at the timeof molding (resin sealing).

[0082] According to features of the QFP 6 that is Embodiment 1, not onlyeach inner lead 1 b is fixed by the thin sheet-shaped tape substrate 5but also, as shown in FIG. 2, a length (a) of a shorter side on thequadrilateral main surface 2 c of the semiconductor chip 2 is twice orless than a distance (b). The distance (b) is between the semiconductorchip 2 and a tip of each of inner leads 1 b which are placed at thefarthest location on each center line 6 a (X-axis or Y-axis) extendingalong a plane direction of the QFP 6.

[0083] That is, a relationship between the shorter side length (a) ofthe semiconductor chip 2 and a clearance (b) from the semiconductor chip2 to such the tip of inner leads 1 b that the tip is farthest from thesemiconductor chip 2, is a 2b.

[0084] Further, the relationship is preferably b a 2b.

[0085] By this, the multiple pins QFP 6 mounting the small semiconductorchip 2 having a narrow pad pitch can certainly have effects onsuppression of the wire flow and the flapping inner leads 1 b.

[0086] As a result, reliability of the QFP 6 can be improved.

[0087] In the QFP 6, since it is possible to mount the semiconductorchip 2 to the tap substrate 5 even if the semiconductor chip 2 isreduced in size, it is no longer necessary to prepare a lead frame suchas a matrix frame 1 (see FIG. 4), single line lead frame 1 g (see FIG.15) and the like as corresponding to a chip size. As a result, it ispossible to standardize the lead frame.

[0088]FIG. 3 shows a relationship between a pad pitch (P) of thesemiconductor chip 2 which is mounted on the QFP 6 and has a narrow padpitch, and a tip pitch (L) between such the inner leads 1 b that a leadpitch between adjacent tips thereof is smallest (narrowest), in the QFP6. The relationship is P L/2.

[0089] That is, because the pad pitch of the semiconductor chip 2 is ½of or ½ less than the minimum value of the tip pitch between theadjacent inner leads 1 b, effectiveness of the QFP 6 mounting thesemiconductor chip 2 having a narrow pad pitch can be enhanced.

[0090] The pad pitch (P) of the semiconductor chip 2 is, for example, 60μm and the minimum value (L) of the tip pitch between the inner leads 1b is, for example, 180 μm. In this case, (P=60 μm) (L=180 μm)/2 isobtained.

[0091] In addition, the QFP 6 according to Embodiment 1 has the narrowpad pitch and has multiple pins. Then, the high effectiveness of the QFP6 can be obtained in the case where a size of the seal portion in aplane direction is, for example, 20 mm×20 mm or more and the number ofpins (the number of external terminals) is 176 or more.

[0092] However, the pad pitch (P), the minimum value (L) of the tippitch between the inner leads 1 b, the size of the seal portion 3 in theplane direction, the number of pins, and the like are not be limited tothe above-mentioned numerical values.

[0093] In the semiconductor chip 2, desired semiconductor integratedcircuits are formed on the main surface 2 c thereof. The pads 2 a formedon this main surface 2 c and the inner leads 1 b corresponding theretoare connected by the wires 4, respectively. And, the outer leads 1 clinked to the inner leads 1 b are outputted to the outside thereof asexternal terminals of the QFP 6, respectively.

[0094] Consequently, signals between the semiconductor chip 2 and theouter leads 1 c are transmitted via the wires 4 and the inner leads 1 b.

[0095] The wires 4 are, for example, gold wires.

[0096] Further, the inner leads 1 b and the outer leads 1 c are, forexample, iron-Ni alloys, copper alloys or the like.

[0097] The seal portion 3 is formed by performing the molding(resin-sealing), for example, using epoxy system thermosetting resin andthe like, and thereafter thermo-hardening this.

[0098] Next, an explanation will be made of a manufacturing method ofthe QFP 6 of Embodiment 1.

[0099] As a lead frame used in the manufacturing method of the QFP 6,first of all, the case of use of a matrix frame 1 shown in FIG. 4 willbe described.

[0100] First, a matrix frame 1 shown in FIG. 4 is prepared in which aplurality of package areas 1 h is formed in a matrix arrangement. Eachof the plurality of package areas 1 h comprises a plurality of innerleads 1 b, a thin sheet-shaped tape substrate 5 (an insulating member)joined to respective end portions of the inner leads 1 b and beingcapable of supporting a semiconductor chip 2, and a plurality of outerleads 1 c linked to the inner leads 1 b.

[0101] That is, the matrix frame 1 is prepared, in which the tapsubstrate 5 as shown in FIG. 5 is fitted in each package area 1 h of aframe body la made of iron-Ni alloys, copper alloys and the like.

[0102] For example, the tape substrate 5 is prepared by applyingadhesives of thermosetting resin to the tape base 5 a and therebyforming the adhesive layer 5 b. In each package area 1 h of the matrixframe 1, the respective end portions of the inner leads 1 b and the tapesubstrate 5 are fixed via the adhesive layer 5 b by a thermo-compressionmethod.

[0103] At this time, the adhesive layer 5 b is formed throughout entireof a surface of an inner lead arrangement side, that is, of a chipsupporting surface 5 c in the tape substrate 5. By this adhesive layer 5b, the respective inner leads 1 b and the tape substrate 5 are joined toone another.

[0104] By this, the matrix frame 1 shown in FIG. 4 is formed.

[0105] In one piece of the matrix frame 1, the package areas 1 hcorresponding to one piece of the QFP 6 are formed in a matrixarrangement. In each of the package areas 1 h, the tape base 5 a isjoined to the respective end portions of the inner leads 1 b via theadhesive layer 5 b having insulating properties.

[0106] Additionally, in each of the package areas 1 h, the plurality ofinner leads 1 b, outer leads 1 c and a dam bar 1 i are arranged,respectively. The plurality of inner leads 1 b extends in fourdirections around the tape substrate 5. The outer leads 1 c are linkedto and integrally formed with the respective inner leads as outerterminals. The dam bar 1 i prevents mold resin from flowing duringmolding. A frame section 1 f of the frame body 1 a supports therespective outer leads 1 c.

[0107] Further, this frame section if has longitudinal holes 1 d forguides and positioning holes 1 e formed for conveying the matrix frame 1during die bonding or wire bonding.

[0108] Thereafter, as shown in FIG. 6 and FIG. 7, in each package area 1h, die-bonding (also called pellet bonding or chip mount) is carried outfor mounting the semiconductor chip 2 to the chip supporting surface 5 cof the tape substrate 5.

[0109] That is, a rear surface 2 b of the semiconductor chip 2 and thechip supporting surface 5 c of the tape substrate 5 are fixed to eachother.

[0110] At this time, the semiconductor chip 2 may be fixed by theadhesive layer 5 b of the tape substrate 5 as shown in FIG. 7, or may befixed by resin paste 8 such as silver paste and the like as shown in themodified example of FIG. 8

[0111] In the tape substrate 5 of each package area 1 h, thesemiconductor chip 2 is mounted on the surface of the inner leadarrangement side of the tape substrate 5, and is mounted such that alength of a shorter side of the main surface of the quadrilateralsemiconductor chip 2 is twice of or twice less than a distance betweenthe semiconductor chip 2 and a tip of an inner lead which is placed onthe center line 6 a of the QFP 6 in the plane direction and at such alocation that the tip thereof is farthest from the center line 6 a.

[0112] That is, a relationship described above is a 2b as shown in FIG.2.

[0113] The semiconductor chip 2 to be incorporated in the QFP 6 ofEmbodiment 1 has a small size, wherein a pad pitch thereof is a narrowpad pitch, for example, of less than 80 μm and, preferably, 60 μm orless.

[0114] Thereafter, as shown in FIG. 9 and FIG. 10, the pads 2 a of thesemiconductor chip 2 and the inner leads 1 b corresponding thereto areconnected to one another by wire bonding.

[0115] That is, by using bonding wires 4 such as gold wires and thelike, wire bonding is carried out. By this wire bonding, wires 4 connectthe pads 2 a and the inner leads 1 b corresponding thereto,respectively.

[0116] A modified example shown in FIG. 11 is the case of use of aglass-containing epoxy substrate 5 d as an insulating member.

[0117] After completion of wire bonding, the semiconductor chip 2, thewires 4, the respective inner leads 1 b and the tape substrate 5 areresin-sealed by the molding method, and the seal portion 3 is formed asshown in FIG. 12 and FIG. 13.

[0118] The mold resin used for the above-mentioned molding is, forexample, epoxy system thermosetting resin and the like.

[0119] After completion of resin sealing, one hundred and seventy-sixouter leads 1 c protruding from the seal portion 3 are cut and separatedby using the cutting mold dies (not illustrated) or the like from theframe portion 1 f of the frame body 1 a of the lead frame 1. Then, asshown in FIG. 1A, the respective outer leads 1 c are bent and formed ina gull-wing shape.

[0120] By this, the QFP 6 (a semiconductor device) shown in FIG. 1 canbe manufactured.

[0121] Subsequently, by using a single line lead frame 1 g shown in FIG.15 as a lead frame, description will be made of the case ofmanufacturing of the QFP 16.

[0122] The single-row lead frame 1 g is formed by arranging a pluralityof package areas 1 h shown in FIG. 14 in a line and linking one thereofto the other. Each of the plurality of package areas 1 h comprises aplurality of inner leads 1 b, the tape substrate 5 which is a thinsheet-shaped insulating member joined to respective end portions of theinner leads 1 b and being capable of supporting the semiconductor chip2, a plurality of outer leads 1 c linked to the inner leads 1 b.

[0123] That is, similarly to the case of the matrix frame 1 shown inFIG. 4, the tape substrate 5 is fixed in each of the package areas 1 hof the frame body 1 a which is shown in FIG. 14 and is formed by linkingin a line to one another each of the plurality of package areas 1 hcomprising the plurality of inner leads 1 b and the plurality of outerleads 1 c linking thereto.

[0124] Thereafter, by procedures similar to a manufacturing method usingthe matrix frame 1, die bonding and wire bonding are carried out toachieve a condition shown in FIG. 16.

[0125] Further, resin sealing is carried out by molds to achieve acondition shown in FIG. 17. Thereafter, cutting and shaping is carriedout to obtain the QFP 6 shown in FIG. 18.

[0126] The completed QFP 6, as shown in FIG. 19, can be mounted on thesame packaging substrate 7 together with a SOP (Small Outline Package)9, other electronic parts or the like by, for example, solder reflow andthe like. The SOP is the other semiconductor package.

[0127] Next, description will be made of modified examples of Embodiment1 shown in FIG. 20 through FIG. 25.

[0128]FIG. 20 is an example using a ceramic substrate 5 e as a thinsheet-shaped insulating member, where the ceramic substrate 5 e and therespective inner leads 1 b are joined by the adhesive layer 5 b. Evenusing the ceramic substrate 5 e can achieve the same effects as usingthe tape substrate 5.

[0129] The QFP 6 shown in FIG. 21 has a construction in which a metalsheet 5 f is fixed on a surface opposite to a surface (a chip supportingsurface 5 c) of the inner lead arrangement side of an insulating membersuch as the tape substrate 5 or the like. FIG. 22 through FIG. 24 showsthe specific examples.

[0130]FIG. 22 shows the case in which the adhesive layer 5 b is used asan insulating member.

[0131] That is, the adhesive layer 5 b is formed by applying insulatingadhesive on one surface of the metal sheet 5 f, and the inner leads 1 band the metal sheet 5 f are joined via this adhesive layer 5 b.

[0132]FIG. 23 shows the adhesive layer 5 b having a double-layer systemcomprising a hard adhesive layer 5 g and a soft adhesive layer 5 h. Thesoft adhesive layer 5 h joins each of the inner leads 1 b and the hardadhesive layer 5 g. The hard adhesive layer 5 g prevents each of theinner leads 1 b from piercing through to a side of the metal sheet 5 fdue to burrs thereof.

[0133] Further, FIG. 24 shows the adhesive layers 5 b formed on bothfront and rear surfaces of the tape base 5 a. By this, the respectiveinner leads 1 b and the tape base 5 a are joined to one another, and thetape base 5 a and the metal sheet 5 f are joined to each other.

[0134] The case of the modified examples shown in FIG. 21 to FIG. 24 canhave effects similar to those obtained by the case of use of the tapesubstrate 5 shown in FIG. 1, and additionally improve heat radiationproperties of the QFP 6 by fixing the metal sheet 5 f.

[0135] A modified example shown in FIGS. 25A and 25B relates to the casewhere the semiconductor device is QFN (Quad Flat Non-leaded Package) 10.The semiconductor device of Embodiment 1 can achieve objects thereofeven if the semiconductor device is the QFN 10.

[0136] The QFN 10 has a construction in which, as shown in FIG. 25B, theouter leads 1 c that become external terminals are arranged on aperipheral edge portion of the rear surface 3 a of the seal portion 3,and which, as shown in FIG. 25A, an insulating member such as the tapesubstrate 5 and the like (a ceramic substrate 5 e, a glass-containingepoxy substrate 5 d, and the like may be acceptable) is fixed atrespective end portions of the inner leads 1 b, and which thesemiconductor chip 2 is fixed on the chip supporting surface 5 c.

[0137] Even in this QFN 10, the relationship between the semiconductorchip 2 and the respective inner leads 1 b is the same as therelationship shown in FIG. 2. Or, the QFP 10 can have the same effectsas the QFP 6 shown in FIG. 1 by setting conditions of both the pad pitchand the tip pitch of the inner leads 1 b as shown in FIG. 3, in additionto this relationship.

EMBODIMENT 2

[0138]FIG. 26 is a cross-sectional view showing one example of aconstruction of a semiconductor device that is Embodiment 2 of thepresent invention. FIG. 27 is a partial cross-sectional view showing oneexample of a construction of a lead frame used for assembly of thesemiconductor device shown in FIG. 26. FIGS. 28 to 33 are partialcross-sectional views showing constructions of lead frames of modifiedexamples that are Embodiment 2 of the present invention. FIG. 34 is apartial cross-sectional view showing one example of thicknessrelationships between a semiconductor chip, an insulating member, and anadhesive layer when the semiconductor chip is mounted to the insulatingmember of the lead frame that is Embodiment 2 of the present invention.FIG. 35 and FIG. 36 are partially enlarged plan views showingconstructions of lead frames of modified examples that are Embodiment 2of the present invention.

[0139] The semiconductor device of Embodiment 2 shown in FIG. 26 is aQFP 11 having a basic construction nearly similar to the QFP 6 ofEmbodiment 1, but does not include the conditions shown in FIG. 2 andFIG. 3 explained in Embodiment 1.

[0140] A basic construction of the QFP 11 comprises a plurality of innerleads 1 b, thin sheet-shaped insulating member, resin paste 8, anadhesive layer 5 b, bonding wires 4, a seal portion 3, and a pluralityof outer leads 1 c. The plurality of inner leads 1 b extends on acircumference of the semiconductor chip 2. The thin sheet-shapedinsulating member supports the semiconductor chip 2 and is joined torespective end portions of the inner leads 1 b. The resin paste 8 joinsthe semiconductor chip 2 and the above-mentioned insulating member toeach other. The adhesive layer 5 b joins the respective inner leads 1 band the above-mentioned insulating member to one another. The bondingwire 4 connects pads 2 a of the semiconductor chip 2 and the inner leads1 b corresponding thereto to one another. The seal portion 3 is formedby resin-sealing the respective wires 4 of the semiconductor chip 2 andthe above-mentioned insulating member. The plurality of outer leads 1 cis linked to the inner leads 1 b and is exposed from the seal portion 3,respectively.

[0141] The features of the QFP 11 that is Embodiment 2 are that aforming place of the adhesive layer 5 b, and material or shape of theinsulating member, and the like are varied.

[0142] First, in FIG. 27, the tape substrate 5 is used as theabove-mentioned insulating member. In addition, the adhesive layer 5 bis disposed only on a lead joining portion 5 l of a surface of an innerlead arrangement side of the tape substrate 5 to which the inner lead isarranged, and a tape base 5 a of the tape substrate 5 and the respectiveinner leads 1 b are joined by the adhesive layer 5 b.

[0143] By this configuration, amount of adhesives for forming theadhesive layer 5 b can be reduced, and reduction of the manufacturingcost can be achieved.

[0144]FIG. 28 shows the case of use of a glass-containing epoxysubstrate 5 d as the above-mentioned insulating member. FIG. 29 showsthe case where the adhesive layer 5 b is disposed only on the leadjoining portion 5 l of the surface of the inner lead arrangement side ofthe glass-containing epoxy substrate 5 d when the glass-containing epoxysubstrate 5 d is used as the above-mentioned insulating member.

[0145] In FIG. 28 and FIG. 29, the glass-containing epoxy substrate 5 dand the respective inner leads 1 b are joined by the adhesive layer 5 b.

[0146]FIG. 30 and FIG. 31 show the case where the glass-containing epoxysubstrate 5 d is used as the insulating member. The glass-containingepoxy substrate 5 d and the respective inner leads 1 b are joined by theadhesive layer 5 b of pressure sensitive adhesive double coated tape 5 ihaving the tape base 5 a, on both front and rear surfaces whose theadhesive layer 5 b is deposited.

[0147] At this time, FIG. 30 shows the case where the pressure sensitiveadhesive double coated tape 5 i is disposed throughout the entiresurface (chip supporting surface 5 c) of the inner lead arrangement sideof the glass-containing epoxy substrate 5 d. FIG. 31 shows the casewhere the pressure sensitive adhesive double coated tape 5 i is disposedonly on the lead joining portion 5 l of the respective inner leads 1 b.

[0148]FIG. 32 and FIG. 33 show cases where the above-mentionedinsulating member is the glass-containing epoxy substrate 5 d containingalumina particles 5 j, and the glass-containing epoxy substrate 5 d andthe respective inner leads 1 b are joined by the adhesive layer 5 b ofthe pressure sensitive adhesive double coated tape 5 i.

[0149] At this time, FIG. 32 shows the case where the pressure sensitiveadhesive double coated tape 5 i is disposed on the entire surface (chipsupporting surface 5 c) of the inner lead arrangement side of theglass-containing epoxy substrate 5 d. FIG. 33 shows the case where themetal sheet 5 f is fixed on a surface located in a side opposite to ajoining side of the pressure sensitive adhesive double coated tape ofthe glass-containing epoxy substrate 5 d.

[0150] By using the glass-containing epoxy substrate 5 d containing thealumina particles 5 j as the insulating member, it is possible to bringthe thermal expansion coefficient of the glass-containing epoxysubstrate 5 d closer to that of silicon in the semiconductor chip 2 andimprove heat radiation properties thereof. Moreover, as shown in FIG.33, by fixing the metal sheet 5 f thereon, the heat radiation propertiescan be further improved.

[0151]FIG. 34 shows such a construction that a thickness (C) of thesemiconductor chip 2 is thicker than a total thickness (D) of theglass-containing epoxy substrate 5 d and the adhesive layer 5 b when theglass-containing epoxy substrate 5 d is used as the insulating member(it may be the tape substrate 5.). A relationship between C and D isC>D.

[0152] By this construction, the heat conductivity thereof can beimproved when the semiconductor chip 2 is die-bonded.

[0153] Further, since the thickness of the semiconductor chip 2 isgreater than the total thickness of the adhesive layer 5 b and theinsulating member such as the glass-containing epoxy substrate 5 d, itis possible to thin the above-mentioned insulating member in thicknessand to thin and form the QFP 11 that is Embodiment 2 of the presentinvention.

[0154] As a result, the material cost can be reduced, and consequently,low cost of the QFP 11 can be attained.

[0155] In modified examples shown in FIG. 35 and FIG. 36, when the tapesubstrate 5 (may be glass-containing epoxy substrate 5 d) is used as aninsulating member, through-holes 5 k of various shapes are formed in thetape substrate 5 and mold resin is embedded in the through-holes 5 k forsealing resin.

[0156]FIG. 35 shows the case where a plurality of round through-holes 5k are provided in the tape substrate 5, and FIG. 36 shows the case whereslender through-holes 5 k are provided in a cross form.

[0157] By the constructions shown in FIG. 35 and FIG. 36, flapping ofthe respective inner leads 1 b can be suppressed, and the wire flow canbe also prevented, and, at the same time, and adhesion between moldresin and the tape substrate 5 can be enhanced, and the reliability ofthe QFP 11 can be improved.

[0158] Respective shapes and forming areas of the through-holes 5 k ofthe tape substrate 5 are not particularly limited if they have suchsizes (shapes) and areas that no wire flow is caused due to mold resin.

[0159] According to the QFP 11 of Embodiment 2, by joining therespective end portions of the inner leads 1 b to the thin sheet-shapedinsulating member such as a tape substrate 5, glass-containing epoxysubstrate 5 d and the like, it is possible suppress wire flow and/orflapping of respective inner leads due to flow of mold resin. As aresult, the narrow pad pitch of the inner leads 1 b can be achieved and,at the same time, disconnection of the respective wires 4 due toflapping of inner leads 1 b can be prevented.

[0160] Further, joining the end portions of the respective inner leads 1b to the above-mentioned thin sheet-shaped insulating member, cansuppress expansion and shrinkage in the vicinity of each tip of theinner leads 1 b at the time of solder reflow generated by thermalexpansion coefficient differences between mold resin and the respectiveinner leads 1 b.

[0161] By this, disconnection generated at joining portions between thewires 4 and the inner leads 1 b can be prevented. As a result, thereliability of the QFP 11 can be improved.

[0162] The QFP 11 has such a construction that the inner leads 1 b eachare fixed to the above-mentioned thin sheet-shaped insulating member(the glass-containing epoxy substrate 5 d, the glass-containing epoxysubstrate 5 d including the alumina particles 5 j, the tape substrate 5or the like). Therefore, as compared to such a construction that theinner leads 1 b each are fixed to a metal thin sheet such as a coppersheet and the like, the matrix frame 1 (see FIG. 4) or the single linelead frame 1 g (see FIG. 15) to which the thin sheet-shaped insulatingmember is fixed can be made lighter and cost lower.

[0163] Further, the above-mentioned copper sheet has a thickness ofabout 120 μm and, at this time, the semiconductor device has a thicknessof about 2.8 to 3 mm, whereas the above-mentioned thin sheet-shapedinsulating member is formed so as to have a thickness of about 50 μmlike Embodiment 2. Therefore, the QFP 11 assembled by using this can bemade about 1 to 1.2 mm in thickness.

[0164] Consequently, according to Embodiment 2, the QFP 11 made lightand thin and having multiple pins can be achieved.

[0165] The manufacturing method of the QFP 11 that is Embodiment 2 isthe same as that of the QFP 6 described in Embodiment 1, and so therepetition thereof will be omitted.

[0166] As described above, the invention made by the present inventorhave been specifically described in accordance with the embodiments ofthe present invention. But, needless to say, the present invention isnot limited to the above-mentioned embodiments and can be variouslymodified and changed without departing from the gist thereof.

[0167] For example, in Embodiment 2 described above, the QFP 11 has beentaken up as the semiconductor device for description, but, as thesemiconductor device of Embodiment 2, outer leaders other than the outerleas 1 c which the QFP 11 has may protrude in two directions.

[0168] The semiconductor device and the manufacturing method thereof ofthe present invention may be contents that combine Embodiment 1 withEmbodiment 2.

[0169] Of the invention disclosed in the present application, effectsobtained by the typical ones can be briefly described as follows.

[0170] (1) By joining the inner leads to the insulating member andsetting the length of a shorter side of the main surface of thesemiconductor chip twice or less than the distance from tips of innerleads arranged at the farthest location from the center lines of thesemiconductor chip, to the semiconductor chip, it is possible tocertainly attain effects on suppression of the wire flow and flopping ofthe inner leads caused by flow of the mold resin due to fixing of theinner leads to the insulating member. As a result, the reliability ofthe semiconductor device of a construction in which the inner leads arejoined to the insulating member can be improved.

[0171] (2) By joining the inner leads to the insulating member andsetting the length of a shorter side of the main surface of thesemiconductor chip twice or less than the distance from tips of innerleads arranged at the farthest location from the center lines of thesemiconductor chip, to the semiconductor chip, it is possible to mountthe semiconductor chip to the insulating member even if the chip becomessmall in size, and it is no longer necessary to prepare the lead frameper size of the chip. As a result, the lead frame can be standardized.

[0172] (3) It is possible to suppress the wire flow and/or the flappingof the inner leads caused by the flow of mold resin, by joining therespective end portions of the inner leads to the insulating member. Asa result, the narrow pad pitch of the inner leads can be achieved and,at the same time, disconnection of the respective wires due to flappingof the inner leads can be prevented.

[0173] (4) It is possible to suppress expansion and shrinkage of therespective end portions of the inner leads at the time of solder reflowcaused by thermal expansion coefficient differences between the moldresin and the respective inner leads, by joining the end portions of theinner leads to the insulating member. This can prevent disconnectiongenerated at the joining section between the wires and the inner leads.As a result, the reliability of the semiconductor device can beimproved.

[0174] (5) Because the semiconductor chip is thicker than a total of theinsulating member and the adhesive layer in thickness, thermalconductivity at the die bonding can be improved.

[0175] (6) Because the semiconductor chip is thicker than a total of theinsulating member and the adhesive layer in thickness, the thickness ofthe insulating member can be reduced and the semiconductor device can beformed in a thin shape. This can reduce the material cost and bring lowcost of the semiconductor device.

What is claimed is:
 1. A semiconductor device comprising: a plurality ofinner leads extending around a semiconductor chip; a thin sheet-shapedinsulating member supporting said semiconductor chip and joined to anend portion of said respective inner leads; a bonding wire forconnecting surface electrodes of said semiconductor chip and said innerleads corresponding thereto; a seal portion formed by resin-sealing saidsemiconductor chip, said wire and said insulating member; and aplurality of outer leads linked to said inner leads and exposed fromsaid seal portion, wherein a length of a shorter side of a main surfaceof said semiconductor chip formed in a quadrilateral shape is twice orless than a distance from a tip of the inner leads arranged at thefarthest location from a center line of the semiconductor chip in aplane direction, to said semiconductor chip.
 2. A semiconductor devicecomprising: a plurality of inner leads extending around a semiconductorchip; a thin sheet-shaped insulating member supporting saidsemiconductor chip and joined to an end portion of said respective innerleads; a bonding wire for connecting surface electrodes of saidsemiconductor chip and said inner leads corresponding thereto; a sealportion formed by resin-sealing said semiconductor chip, said wire andsaid insulating member; and a plurality of outer leads linked to saidinner leads and exposed from said seal portion, wherein a length of ashorter side of a main surface of said semiconductor chip formed in aquadrilateral shape is longer than a distance from a tip of the innerleads arranged at the farthest location from a center line of thesemiconductor chip in a plane direction, to said semiconductor chip, andis twice or less than this distance.
 3. The semiconductor deviceaccording to claim 1, wherein an arrangement pitch of said surfaceelectrodes of said semiconductor chip is ½ or less than a minimum valueof a tip pitch between said inner leads adjacent to each other.
 4. Thesemiconductor device according to claim 1, wherein said semiconductordevice has a seal portion thereof of 20 mm×20 mm or more in plane sizeand said outer leads of 176 or more.
 5. The semiconductor deviceaccording to claim 1, wherein said insulating member is a tape substratecomprising a tape base and an adhesive layer, and said tape base andsaid inner leads are joined to one another by said adhesive layer. 6.The semiconductor device according to claim 1, wherein said insulatingmember is a glass-containing epoxy substrate, and said glass-containingepoxy substrate and said inner leads are joined to one another by anadhesive layer.
 7. The semiconductor device according to claim 1,wherein said insulating member is a ceramic substrate, and said ceramicsubstrate and said inner leads are jointed to one another by an adhesivelayer.
 8. The semiconductor device according to claim 1, wherein saidsemiconductor chip is mounted in a surface of an inner lead arrangementside of said insulating member.
 9. The semiconductor device according toclaim 1, wherein a metal sheet is fixed to a surface opposite to thesurface of the inner lead arrangement side of said insulating member.10. The semiconductor device according to claim 1, wherein said innerleads and said insulating member are joined by an adhesive layer, andsaid semiconductor chip is thicker than a total of said insulatingmember and said adhesive layer in thickness.
 11. The semiconductordevice according to claim 1, wherein said insulating member is aglass-containing epoxy substrate, and said glass-containing epoxysubstrate and said inner leads are jointed by adhesive layers of apressure sensitive adhesive double coated tape having the tape base, onboth front and rear surfaces whose said adhesive layers are disposed.12. The semiconductor device according to claim 1, wherein saidinsulating member is an glass-containing epoxy substrate which containsalumina particles, and said glass-containing epoxy substrate and saidinner leads are joined by an adhesive layer.
 13. The semiconductordevice according to claim 1, wherein a through-hole is formed in saidinsulating member, and mold resin is embedded in said through-hole. 14.The semiconductor device according to claim 1, wherein said inner leadsand said insulating member are joined by an adhesive layer, and saidadhesive layer is disposed throughout the entire of a surface of aninner lead arrangement side of said insulating member.
 15. Thesemiconductor device according to claim 1, wherein said inner leads andsaid insulating member are joined by an adhesive layer, and saidadhesive layer is disposed just on a lead joining portion of a surfaceof the inner lead arrangement side of said insulating member.
 16. Asemiconductor device comprising: a plurality of inner leads extendingaround a semiconductor chip; a thin sheet-shaped insulating membersupporting said semiconductor chip and joined to an end portion of saidrespective inner leads; an adhesive layer for joining said inner leadsand said insulating member; a bonding wire for connecting surfaceelectrodes of said semiconductor chip and said inner leads correspondingthereto; a seal portion formed by resin-sealing said semiconductor chip,said wire and said insulating member; and a plurality of outer leadslinked to said inner leads and exposed from said seal portion.
 17. Thesemiconductor device according to claim 16, wherein said semiconductorchip is thicker than a total of said insulating member and said adhesivelayer in thickness.
 18. The semiconductor device according to claim 16,wherein said insulating member is a tape substrate comprising a tapebase and an adhesive layer, and said tape base and said inner leads arejoined by said adhesive layer.
 19. The semiconductor device according toclaim 16, wherein said insulating member is a glass-containing epoxysubstrate, and said glass-containing epoxy substrate and said innerleads are joined by an adhesive layer.
 20. The semiconductor deviceaccording to claim 16, wherein said insulating member is aglass-containing epoxy substrate, and said glass-containing epoxysubstrate and said inner leads are joined by adhesive layers of apressure sensitive adhesive double coated tape having a tape base, onboth front and rear surfaces whose the adhesive layers are disposed. 21.The semiconductor device according to claim 16, wherein said insulatingmember is a glass-containing epoxy substrate which contains aluminaparticles, and said glass-containing epoxy substrate and said innerleads are joined by an adhesive layer.
 22. The semiconductor deviceaccording to claim 16, wherein a through-hole is formed in saidinsulating member, and mold resin is embedded in said through-hole. 23.The semiconductor device according to claim 16, wherein said adhesivelayer is disposed throughout the entire of a surface of an inner leadarrangement side of said insulating member.
 24. The semiconductor deviceaccording to claim 16, wherein said adhesive layer is disposed only on alead joining portion of a surface of an inner lead arrangement side ofsaid insulating member.
 25. A manufacturing method of a resin-sealingtype semiconductor device comprising the steps of: preparing amulti-link lead frame formed by linking in a line with a plurality ofpackage areas, each of the package areas including a plurality of innerleads, a thin sheet-shaped insulating member joined to an end portion ofeach of said inner leads and capable of supporting a semiconductor chip;mounting said semiconductor chip on said insulating member in each ofsaid package area; connecting surface electrodes of said semiconductorchips and said inner leads corresponding thereto by a wire; forming aseal portion by resin-sealing said semiconductor chips, said wire, andsaid insulating member; and separating a plurality of outer leadsexposed from said seal portion, from a frame section of said lead frame.26. A manufacturing method of a resin-sealing type semiconductor devicecomprising the steps of: preparing a matrix frame formed by arranging aplurality of package areas in a matrix arrangement, each of the packageareas including a plurality of inner leads, a thin sheet-shapedinsulating member joined to an end portion of each of said inner leadsand capable of supporting a semiconductor chip; mounting saidsemiconductor chip on said insulating member in each of said packagearea; connecting surface electrodes of said semiconductor chips and saidinner leads corresponding thereto by a wire; forming a seal portion byresin-sealing said semiconductor chips, said wire, and said insulatingmember; and separating a plurality of outer leads exposed from said sealportion, from a frame section of said matrix frame.
 27. Themanufacturing method of a semiconductor device according to claim 25,further comprising a step of mounting said semiconductor chip on asurface of an inner lead arrangement side of said insulating member whensaid semiconductor chip is mounted on said insulating member.
 28. Themanufacturing method of a semiconductor device according to claim 25,wherein said semiconductor chip is arranged and mounted such that alength of a shorter side of a main surface of said semiconductor chipformed in an quadrilateral shape is twice or less than a distance from atip of the inner leads arranged at the farthest location from a centerline of the semiconductor chip in a plane direction, to saidsemiconductor chip, when said semiconductor chip is mounted on saidinsulating member.
 29. The manufacturing method of a semiconductordevice according to claim 25, further comprising a step of beingassembled by using said lead frame in which said inner leads and saidinsulating member are joined by an adhesive layer disposed throughoutthe entire of a surface of an inner lead arrangement side of saidinsulating member.
 30. The manufacturing method of a semiconductordevice according to claim 25, further comprising a step of beingassembled by using said lead frame in which said inner leads and saidinsulating member are joined by an adhesive layer disposed only on alead joining portion of a surface of an inner lead arrangement side ofsaid insulating member.